Motion Profile Generation


Increase Throughput with Advanced Motion Profiles

Demanding point-to-point motion applications such a semiconductor and FPD inspection and metrology equipment can perform static measurements at thousands of points across the wafer or panel. In such applications, every millisecond that can be eliminated from the motion is critical. ACS’ MotionBoost algorithm generates advanced motion profiles that minimize energy injected into the stage, resulting in reduced vibration and settling time.