Position Event Generation (PEG)

High speed, on-the-fly event triggering synchronized to precise positioning

High-resolution inspection, metrology, patterning, and printing applications rely on the motion control system to accurately trigger devices, including cameras, inspection heads, and lasers at high speed. ACS drive and drive interface products provide this capability via Position Event Generation (PEG). Flexible operating modes are supported, including incremental fixed distance pulsing, array-based random distance pulsing, and array-based random distance gating.

Capabilities

• Enables sub-micron accuracy triggering of devices synchronized to a digital AqB encoder
• Incremental (fixed distance) triggering up to 10 MHz
• Random (array based) triggering up to 100 kHz in select products
• Flexible output options for triggering multiple sensors
• Multi-axis path triggering alternatives also available
• Straightforward configuration with PEG Wizard and PEG structures
• Commonly used in SEMI and FPD inspection and metrology applications