NanoPWM

Advanced servo drive and algorithm technology for sub-nanometer precision

High-end semiconductor equipment including inspection, metrology, and hybrid bonding systems requires nanometer-level positioning. Despite their low power efficiency, linear amplifiers have traditionally been used instead of PWM amplifiers for these applications because of their high dynamic range and linearity.  

NanoPWM servo drive technology provides the advantages of a PWM amplifier while achieving or exceeding the motion performance of a linear amplifier. This enables OEMs designing equipment with precision motion stages for high-throughput applications to achieve high velocities/accelerations and nanometer-level positioning.

Key Benefits

• Achieve nanometer to sub-nanometer standstill jitter  
• Achieve low constant velocity error 
• Improved reliability and power density vs. linear amplifier drives 
• Achieve high stage velocities and accelerations to maximize throughput 
• Maximize cross-roller bearing stage and air-bearing stage performance